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Vacuum chamber helium leak detection and recovery system

Vacuum chamber helium leak detection and recovery system (helium filled outside the tank)

Word:[Big][Middle][Small] Mobile page qrcode 2019/10/10     Viewed:    


Basic functions (optional for some functions)
1. Outside the box, fill the workpiece with high-pressure nitrogen / air for pressure strength and large leakage tightness inspection;
2. Vacuum the workpiece outside the chamber;
3. Fill helium into the workpiece outside the chamber;
4. Put it into the vacuum box and carry out helium mass spectrometry detection by vacuum box method to automatically judge whether the leakage rate of the workpiece is qualified or not;
5. Take out the box for recycling and recycle helium;
6. PLC control, touch screen operation, automatic detection.
Main parameters and advantages
1. Secondary leak detection technology: large leakage detection outside the chamber and micro leakage inside the box;
2. Zero suppression of helium background ensures the accuracy and high precision of leak detection;
3. Helium cleaning system: the unique three-stage helium cleaning technology can quickly and effectively remove the excessive helium background and ensure the stability and accuracy of detection;
4. Real time monitoring of helium concentration: real time monitoring of helium pressure and concentration ensures the accuracy of workpiece detection;
5. High recovery rate of helium: the helium recovery rate is greatly improved by using low-pressure helium replenishment and seal upgrading;
6. Detection efficiency: it can detect multiple workpieces at the same time;
7. Human machine interface: touch screen displays real-time monitoring data and operation parameters, and the monitoring is clear at a glance;
8. Security protection: grating protection, electrical interlock protection, level password control, sound and light alarm.

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